EXPOSURE MACHINES MANUFACTURING SEMICONDUCTOR

Brand Owner (click to sort) Address Description
ORC ORC Manufacturing Co., Ltd. 9-6 Oyamagaoka 3-chome, Machida-shi Tokyo 194-0215 Japan Exposure machines for manufacturing semiconductor devices, exposure machines for manufacturing electronic circuit boards, namely, printed circuit boards; exposure machines for manufacturing liquid crystal displays, projection exposure machines, direct exposure machines, ultraviolet exposure machines for manufacturing semiconductor devices;
PPS ORC Manufacturing Co., Ltd 9-6, Oyamagaoka 3-chome, Machida-shi Tokyo 194-0215 Japan Exposure machines for manufacturing semiconductor devices; exposure machines for manufacturing electronic circuit boards; semiconductor manufacturing machines;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. In a semiconductor device manufacturing method, the step of calculating an exposure time of a photoresist includes (a) a step of deciding whether or not a variation of a line width of a device pattern 104 or a resist pattern 102a in a reference chip in a plurality of semiconductor wafers 101 that are manufactured in the past and have the same wafer information as an subject semiconductor wafer 101 is contained within a tolerance over a plurality of semiconductor wafers 101 in the past, and (b) a step of correcting the exposure time every chip by using an exposure correction table 22 if it is decided in the step (a) that the variation falls within the tolerance.