HIGH PURITY SILICON CARBIDE FURNACE

Brand Owner (click to sort) Address Description
WAVE PURE COORSTEK, INC. 14143 Denver West Parkway, Suite 400 Golden CO 80401 High purity silicon carbide furnace components used in processing silicon wafers, namely, vertical boats, pedestals, liners, process tubes, horizontal contiguous boats, paddles, baffles and susceptor plates;
WAVE PURE Saint-Gobain Ceramics & Plastics, Inc One New Bond Street Worcester MA 01615 High purity silicon carbide furnace components used in processing silicon wafers, namely, vertical boats, pedestals, liners, process tubes, horizontal contiguous boats, paddles, baffles and susceptor plates;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. Silicon carbide matrix composite material (1) comprises silicon carbide matrix (2) as a host. The silicon carbide matrix (2) comprises first silicon carbide phase (3) of 0.1 to 10 ?m average crystal grain diameter and second silicon carbide phase (4) of 0.01 to 2 ?m average crystal grain diameter. In interstices of silicon carbide crystal grains constituting the silicon carbide matrix (2), liberated silicon phase (5) amounting to, for example, 5 to 50 mass % based on the composite material (1) is present continuously in network form. This fine structure enables realizing high strength and high toughness of the silicon carbide composite material (1).