MULTILAYER DEPOSITION MACHINES MANUFACTURING

Brand	Owner	Address	Description
S-PRINT	THE EX ONE COMPANY	127 Industry Boulevard North Huntingdon PA 15642	Multilayer deposition machines for manufacturing molds and cores for casting objects;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A system and method is disclosed for adjusting the ratio of deposition times to optimize via density and via fill in an aluminum multilayer metallization process during a manufacturing process of a semiconductor wafer. In a two-step cold/hot aluminum sputtering process via fill becomes more challenging as via density increases. The invention increases the percentage of successful via fills by changing the ratio of the cold/hot deposition times. Denser via structures require extended cold deposition times to compensate for higher via density. The percentage of successful via fills was increased from forty percent (40%) to seventy percent (70%) by changing the ratio of the cold/hot deposition times from 60:40 to 79:21.