ANALOG DATA MONITOR CONTROL

Brand Owner Address Description
DIGI-LINK Kaye Instruments, Inc. 101 Billerica Avenue, Building No. 7 Billerica MA 01862 Analog Data Monitor and Control System with Computational and Communications Capabilities;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A method of offline measurement for process tool monitoring applied to semiconductor processes. A self-tuning monitor rule database, storing predefined monitor rules for lot processing is provided. Monitor data related to the lot processing is defined. Desired monitor data is obtained according to selected monitor rules residing in the self-tuning monitor rule database. Offline measurement operations are implemented according to the obtained monitor data using a process tool to generate monitor results. It is determined whether abnormal states exist by comparing the selected monitor rules and monitor data according to the monitor results. If so, the lot processing for the process tool is terminated. If not, the lot processing for the process tool is allowed. A failure notice is sent in response and the selected monitor rules are re-defined to update the self-tuning monitor rule database.