ANTI STATIC SOLUTION USE

Brand	Owner	Address	Description
INGROMAT	Wandres GmbH Micro-Cleaning	Im Gewerbepark 8 79252 Stegen Germany	anti-static solution for use in industrial cleaning machines;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A cleaning solution for a cured anti-reflective layer (AFC layer) component and a method of cleaning an anti-reflective layer component by using the same, wherein the cleaning solution comprises about 5-30% by weight of ammonium hydroxide, about 23-70% by weight of an organic solvent and about 10-50% by weight of water. When an organic material is spattered to adjacent equipment during implementing a coating process onto a wafer, the equipment is detached and then is dipped into the cleaning solution. Thereafter, the equipment is rinsed and dried. Cured and non-cured organic materials are advantageously removed. Cured organic materials left for a period of time, particularly anti-reflective layer components are advantageously removed.