APPARATUS CONTROLLING AIR FLOW

Brand Owner (click to sort) Address Description
INTERCEPTOR Klabin Design, Inc. 71 Village Park Road Cedar Grove NJ 07009 Apparatus for controlling air flow from electric hand dryers;
RIAX HOWDEN NORTH AMERICA INC. 7909 PARKLANE ROAD SUITE 300 COLUMBIA SC 29223 Apparatus for controlling air flow, namely, air flow controllers for ventilation fans and air flow silencers for ventilation fans;
RIAX HOWDEN BUFFALO INC. - NPD 338 SOUTH BROADWAY NEW PHILADELPHIA OH 44663 Apparatus for controlling air flow, namely, air flow controllers for ventilation fans and air flow silencers for ventilation fans;
RIAX NEW PHILADELPHIA FAN COMPANY 338 SOUTH BROADWAY NEW PHILADELPHIA OH 44663 Apparatus for controlling air flow, namely, air flow controllers for ventilation fans and air flow silencers for ventilation fans;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A method and apparatus for gas control is provided. The apparatus may be used for controlling gases delivered to a chamber, controlling the chamber pressure, controlling the delivery of backside gas between a substrate and substrate support and the like. In one embodiment, an apparatus for controlling gas control includes at least a first flow sensor having a control valve, a first pressure sensor and at least a second pressure sensor. An inlet of the first flow sensor is adapted for coupling to a gas supply. A control valve is coupled to an outlet of the flow sensor. The first pressure sensor is adapted to sense a metric indicative of the pressure upstream of the first flow sensor. The second pressure sensor is adapted to sense a metric indicative of the pressure downstream of the control valve.