APPARATUS FOR PRODUCING GAS

Brand Owner Address Description
DX SURFACE COMBUSTION, INC. 1700 Indian Wood Circle Maumee OH 43537 Apparatus for Producing a Gas for Use as a Special Atmosphere in Industrial Heating Furnaces;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. There are disclosed a production apparatus for producing a gallium nitride semiconductor film by HVPE process, a cleaning apparatus for cleaning exhaust gas coming from the above apparatus and an overall production plant for producing a gallium nitride semiconductor by HVPE process. Therein exhaust piping for exhaust gas in the production apparatus, introduction piping for the cleaning apparatus and exhaust gas piping which connects the production apparatus and the cleaning apparatus are each composed of an electroconductive corrosion-resistant material and are each electrically grounded, thereby surely preventing electrostatic charging due to friction between ammonium chloride powders in the exhaust gas and inside walls of exhaust gas piping, and markedly enhancing operational safety.