APPLICANT DISCLAIMS MARK OPTICAL

Brand	Owner	Address	Description
TEXAS STATE OPTICAL	TSO, INC.	5858 Westheimer, Suite 330 Houston TX 77057	APPLICANT DISCLAIMS THE MARK OPTICAL APART FROM THE MARK AS SHOWN.;RETAIL OPTICAL STORE SERVICES AND OPTICIAN SERVICES;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

An aberration mark for use in an optical photolithography system, and a method for estimating overlay errors and optical aberrations. The aberration mark includes an inner polygon pattern and an outer polygon pattern, wherein each of the inner and outer polygon patterns include a center, and two sets of lines and spaces having a different feature size and pitch that surround the outer polygon pattern. The aberration mark can be used to estimate overlay errors and optical aberrations. In some embodiments, the mark can also be used with scatterometry or scanning electron microscope devices. In other embodiments, the mark can be used to monitor aberrations of a lens in an optical photolithography system.