AUTOMATED INSPECTION DEVICE COMPRISING OPTICAL

Brand Owner Address Description
CONSTELLATION KLA-TENCOR CORPORATION One Technology Drive Milpitas CA 95035 Automated inspection device comprising optical scanning hardware and software for the inspection and analysis of data, namely, the inspection and characterization of semiconductor wafers for defects;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. An inspection system, and process for use thereof, for inspecting semiconductors or like substrates. The inspection system includes an inspection device and an auxiliary sensor apart from the inspection device. The auxiliary sensor is used to collect height data and generate a map of a semiconductor or like substrate to aids in focusing the inspection device.