AUTOMATED OPTICAL IMAGING APPARATUS

Brand	Owner	Address	Description
IMAGEXPRESS	MOLECULAR DEVICES	3860 N. First Street San Jose CA 95134	Automated optical imaging apparatus and instruments, namely, microscopes, scanners and computer hardware for researching and studying biological specimens; automated imaging systems comprising microscopes, scanners and computer hardware for viewing digital images of microscopic slides and plates and biological samples and for data acquisition in the field of drug discovery and life science research;IMAGE XPRESS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

An optical apparatus used for the efficient characterization of photoresist material includes at least one grating interferometer having at least two gratings that together define an optical recombination plane. An optical stop blocks any zeroth order beam from propagating through the apparatus. A reticle positioned at the recombination plane has at least one fiducial marking therein. A lithographic imaging optical tool is positioned so that its input optical plane is substantially coincident with the optical recombination plane and its output imaging plane is substantially coincident with photoresist on a wafer. The apparatus writes in the photoresist latent, sinusoidal grating patterns, preferably of different spatial frequencies, as well as at least one fiducial mark whose pattern is determined by the marking in the reticle. After the photoresist is developed, its intrinsic spatial resolution may be determined by automated means.