AUTOMATIC DOFFERS CLEANING SYSTEMS

Brand	Owner	Address	Description
AUDOMAC	WHITIN MACHINE WORKS	WHITINSVILLE MA	AUTOMATIC DOFFERS AND CLEANING SYSTEMS FOR SPINNING FRAMES AND SPINNING MILLS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method for forming features in dielectric layers and opening barrier layers for a plurality of wafers and cleaning an etch chamber after processing and removing each wafer of the plurality of wafers is provided. A wafer of the plurality of wafers is placed into the etch chamber wherein the wafer has a barrier layer over the wafer and a dielectric layer over the barrier layer. The dielectric layer is etched. The barrier layer is opened. The wafer is removed from the etch chamber. A waferless automatic cleaning of the etch chamber without the wafer is provided. The waferless automatic cleaning comprises providing a waferless automatic cleaning gas comprising oxygen and nitrogen to the etch chamber and forming a waferless automatic cleaning plasma from the waferless automatic cleaning gas to clean the etch chamber.