CHEMICAL ANTI REFLECTIVE COATINGS USE

Brand Owner (click to sort) Address Description
SWK Tokyo Ohka Kogyo Kabushiki Kaisha 150 Nakamaruko Nakahara-ku, Kawasaki-shi Kanagawa-ken 211 Japan chemical anti-reflective coatings for use in electronic and optical industries, namely, on the bottom layer of photoresist surfaces;Applicant notes that the term SWK is an acronym for Standing Wave Killer.;
TSP Tokyo Ohka Kogyo Kabushiki Kaisha 150 Nakamaruko Nakahara-ku, Kawasaki-shi Kanagawa-ken 211 Japan chemical anti-reflective coatings for use in electronic and optical industries, namely, for use on photoresist surfaces;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A cross-linking polymer for an organic anti-reflective coating that is able to improve the uniformity of an ultra-fine photoresist pattern formed using a photolithography process and an ArF light source with 194 nm wavelength. Organic anti-reflective coatings including the same and a method for forming a photoresist pattern using the same are also disclosed. The disclosed cross-linking polymer is capable of preventing scattered reflection from a bottom film layer, eliminating standing wave effect due to alteration of thickness of the photoresist film, and increasing uniformity of the thickness of photoresist pattern. At the same time, the disclosed cross-linking pattern increases the etching velocity of the organic anti-reflective coating so that it can be easily removed.