CHEMICAL PRECURSOR INTEGRATION SELECTION SERVICES

Brand Owner Address Description
COM-PAT VERSUM MATERIALS US 8555 S. River Parkway Tempe AZ 85284 Chemical precursor integration selection services for the semiconductor manufacturing industry, namely, advising others in the selection of compatible chemicals for use in manufacturing semiconductors;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A reactor vessel is provided with a solvent in a supercritical PVT state for use in depositing films on a deposition substrate. A metal organic precursor is dissolved in the supercritical solvent, as is a reaction agent. A chemical reaction deposits a film, such as a metal film on a semiconducting wafer, and reaction byproducts including a ligand ensue from the chemical reaction. Effluent from the reactor vessel is submitted to a precursor-forming agent that reacts with the ligand to rejuvenate the precursor. Alternatively, the precursor-forming agent can be used for point-of-use formation of the precursor with or without recycle of reaction byproducts.