CHEMICAL SOLUTION SLURRY FEEDER

Brand Owner Address Description
MEC-O-MATIC PULSAFEEDER, INC. 27101 Airport Road Punta Gorda FL 33982 CHEMICAL SOLUTION AND SLURRY FEEDER PUMP UNITS, AND PARTS THEREOF;
 

Where the owner name is not linked, that owner no longer owns the brand

   
Technical Examples
  1. A chemical-mechanical polishing apparatus comprising at least a polishing platen, a polishing pad, a slurry supplying piping, a polishing pad conditioner, a chemical reagent supplying piping and a splitting piping is provided. The polishing platen has a plurality of slurry outlets disposed thereon and the polishing pad is disposed on the polishing platen. The slurry supplying piping is connected to the bottom of the polishing platen for delivering slurry to the surface of the polishing pad through the slurry outlets. The polishing pad conditioner is disposed over the polishing pad. The chemical reagent supplying piping is connected to the polishing pad conditioner for supplying the chemical reagent to the polishing conditioner. The splitting piping is connected between the slurry supplying piping and the chemical reagent supplying piping for providing chemical reagent to the surface of the polishing pad through the slurry supplying piping and the slurry outlets.