CHEMICAL VAPOR DEPOSITION EQUIPMENT

Brand	Owner (click to sort)	Address	Description
CONFORMA	CVD Systems, Inc.	25 Esquire Road North Billerica MA 01862	CHEMICAL VAPOR DEPOSITION EQUIPMENT, NAMELY, VAPORIZATION CHAMBERS AND CHEMICAL VAPORIZERS; CHEMICAL VAPOR DELIVERY CONDUITS; DEPOSITION CHAMBERS INCLUDING SEMICONDUCTOR PROCESSING CHAMBERS; ELECTRONIC CONTROLLERS FOR CONTROLLING CHEMICAL VAPOR DEPOSITION; SENSORS, HEATERS, VALVES, AND OTHER FLOW REGULATORS ASSOCIATED WITH THE AFORESAID GOODS; AND PARTS FOR ALL OF THE AFORESAID GOODS;
ECOCOAT	Yield Engineering Systems, Inc.	3178 Laurelview Ct. Fremont CA 94538	Chemical vapor deposition equipment, namely, environment-friendly chemical vapor deposition apparatus for use in research;ECO COAT;
SOLIS	Applied Materials, Inc	3050 Bowers Ave Santa Clara CA 95054	Chemical vapor deposition equipment and apparatus having a remote plasma source for the processing and production of semiconductor thin films;Semiconductor manufacturing equipment having a remote plasma source, namely chemical vapor deposition systems, for the manufacturing of integrated circuits;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A technique for more efficiently forming conductive elements, such as conductive layers and electrodes, using chemical vapor deposition. A conductive precursor gas, such as a platinum precursor gas, having organic compounds to improve step coverage is introduced into a chemical vapor deposition chamber. A reactant is also introduced into the chamber that reacts with residue organic compounds on the conductive element so as to remove the organic compounds from the nucleating sites to thereby permit more efficient subsequent chemical vapor deposition of conductive elements.