CLEANING COMPOUNDS FOR USE ON

Brand	Owner (click to sort)	Address	Description
DU PONT	E. I. DU PONT NEMOURS AND COMPANY	Wilmington DE	CLEANING COMPOUNDS FOR USE ON CARPETS AND UPHOLSTERY FABRICS;
SERMAC	SERVICEMASTER INDUSTRIES INC.	Downers Grove IL	CLEANING COMPOUNDS FOR USE ON TILE, MASONRY, STONE, PLASTIC, WOOD, METAL, AND PAINTED SURFACES;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A post-etch residue cleaning composition for cleaning ashed or unashed aluminum/SiN/Si post-etch residue from small dimensions on semiconductor substrates. The cleaning composition contains supercritical CO2 (SCCO2), alcohol, fluoride source, an aluminum ion complexing agent and, optionally, corrosion inhibitor. Such cleaning composition overcomes the intrinsic deficiency of SCCO2 as a cleaning reagent, viz., the non-polar character of SCCO2 and its associated inability to solubilize species such as inorganic salts and polar organic compounds that are present in the post-etch residue and that must be removed from the semiconductor substrate for efficient cleaning. The cleaning composition enables damage-free, residue-free cleaning of substrates having ashed or unashed aluminum/SiN/Si post-etch residue thereon.