COATING MACHINES ATOMIC SCALE

Brand	Owner	Address	Description
BENEQ TRANSFORM	Beneq Group Oy	Olarinluoma 9 FI-02200 Espoo Finland	Coating machines for atomic scale layer deposition;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Disclosed is a ReCrNi alloy coating for diffusion barrier, such as a high-temperature equipment member, consisting essentially of a ternary alloy and having, except for inevitable impurities, an atomic composition of 20% to 80% Re, an atomic composition of 20% to 60% Cr, and an atomic composition of 5% to 40% Ni. Even if the alloy coating for diffusion barrier includes a diffusion layer containing at least one of the group consisting of Al, Si and Cr, a desired alloy composition of the alloy coating for diffusion barrier can be assured by a surface coating process and diffused components from the substrate while substantially preventing the diffusion of the elements of the diffusion layer during a homogenizing heat treatment. The alloy coating for diffusion barrier may include a Re-containing-alloy stress relief layer inserted between the film and the substrate. The ReCrNi alloy coating can suppress the deterioration of the substrate and the coating layer due to the reaction therebetween to provide an extended life span of the equipment member.