COMPUTER CONTROLLED PHOTOMASK INSPECTION APPARATUS

Brand	Owner	Address	Description
ADD	KLA Instruments Corporation	4598 Patrick Henry Dr. Santa Clara CA 95050	Computer Controlled Photomask Inspection Apparatus Having Automatic Defect Discrimination Features;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A photomask evaluating method comprises calculating a killer defect rate function with respect to a simulative defect pattern including a pattern of photomask and a plurality of defects, the killer defect rate function representing a killer defect rate of the simulative defect pattern with respect to a desired density of the pattern and a desired size of the plurality of defects, calculating the number of killer defects in an inspection region of the photomask based on an area of the photomask inspection region, a pattern density in the inspection region, the killer defect rate function and a defect size distribution representing the number of defects per unit area to a defect size range acquired from a photomask manufacturing step, and evaluating the photomask based on the calculated number of the killer defects.