ELECTRONIC DEVICES OPTICALLY INSPECTING

Brand	Owner (click to sort)	Address	Description
BLI	HORIBA, LTD.	2, Miyanohigashi-cho Kisshoin, Minami-ku Kyoto-shi, Kyoto 601-8510 Japan	Electronic devices for optically inspecting mask blank samples or mask substrate samples used in the field of photolithography for foreign matter;
PR-PD	HORIBA, LTD.	2, Miyanohigashi-cho Kisshoin, Minami-ku Kyoto-shi, Kyoto 601-8510 Japan	Electronic devices for optically inspecting samples used in the field of photolithography for defects or foreign matter;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A system is provided for processing electronic devices, and in particular for handling, inspecting, sorting and offloading the same. An apparatus for inspecting an electronic device comprises a holder for supporting the electronic device and a driving mechanism for moving the electronic device between an onloading position where the electronic device is placed onto the holder and an offloading position where the electronic device is removed from the holder. A first optical system between the onloading and offloading positions is configured to inspect a first surface of the electronic device while it is supported by the holder, Concurrently or subsequently, a second optical system between the onloading and offloading positions is configured to inspect a second surface of the electronic device that is opposite to the first surface while it is supported by the holder.