ELECTRONIC VACUUM GAUGE CONTROLLER

Brand	Owner (click to sort)	Address	Description
760 PLUS	TELEDYNE TECHNOLOGIES INCORPORATED	c/o David Zoetewey 1049 Camino Dos Rios Thousand Oaks CA 91360	Electronic vacuum gauge and controller for measuring and controlling the pressure in any system by sensing the degree of partial vacuum;SEVEN HUNDRED SIXTY PLUS;
MODEL 2002	TELEDYNE INSTRUMENTS, INC.	1049 Camino Dos Rios Thousand Oaks CA 91360	Electronic vacuum gauge and controller for measuring and controlling the pressure in any system by sensing the degree of partial vacuum;MODEL TWO THOUSAND TWO;MODEL;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

The downtime of a vacuum processing apparatus due to wet cleaning is reduced. In a vacuum processing apparatus that requires aging for its chamber or process container after vacuum evacuation of the apparatus and before actual processing of a workpiece, when the chamber has been opened to atmosphere for the purpose of wet cleaning or component replacement, the apparatus comprises a high precision absolute pressure gauge for use in processing, a wide range gauge capable of measuring a wide range of pressures, and a controller, wherein the controller uses a pressure trend during vacuum evacuation to determine whether the vacuum evacuation is satisfactory, and starts aging upon determining that the vacuum evacuation is satisfactory even if the actual pressure is not below a prescribed value. The controller determines relationship between an apparent flow rate (leak rate) measured by the absolute pressure gauge when the chamber is vacuum sealed, and a chamber pressure measured by the wide range gauge, and then measures only the pressure to determine whether a baseline leak rate is reached.