ELECTROSTATIC CHUCK SEMICONDUCTOR MANUFACTURING

Brand	Owner	Address	Description
EXPUR	Sumitomo Osaka Cement Co., Ltd.	6-28, Rokubancho Chiyoda-ku, Tokyo 102-8465 Japan	Electrostatic chuck for semiconductor manufacturing machines and systems;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Disclosed is an electrostatic chuck and system for maintaining a device flat within the electrostatic chuck. The electrostatic chuck has a plate, height adjustment mechanisms connected to the plate; and electrostatic chuck pins connected to the height adjustment mechanisms. The system provides a measurement tool adapted to measure the flatness of the device held by the electrostatic chuck pins and a computer connected to the height adjustment mechanisms and the measurement tool. The computer adjusts the flatness of the device by adjusting the height adjustment mechanisms based on feedback from the measurement tool. The computer is adapted to change the shape of the device to conform to a pre-existing standard.