EQUIPMENT PRECISION MEASUREMENT

Brand	Owner	Address	Description
MICROPOINT	VALMET AUTOMATION (CANADA) LTD.	4401 STEELES AVENUE WEST NORTH YORK, ONTARIO M3N 2S4 Canada	equipment for the precision measurement of web properties and computer-based process measurement controls for the pulp and paper industry;micro-point;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Disclosed is a scanning electron microscope (SEM) for realizing high-precision dimension measurement of a sample, such as an ArF exposure photoresist, that requires the measurement of a dimension by a low S/N signal waveform. To this end, partial waveforms (or partial images) of sample signal waveforms (or an images) acquired from a dimension measurement target sample and a sample material of the same kind are registered in advance, a measurement target signal waveform (or an image) obtained from the dimension measurement target sample and the sample registration waveform are combined, and a dimension of the dimension measurement target pattern is calculated based on the combination result.