ETCH YOURS

Brand	Owner	Address	Description
ETCHYOURS	ELYEL CORPORATION	6160 Innovation Way Carlsbad CA 92009	ETCH YOURS;RETAIL BUSINESS SERVICE, FRANCHISE BUSINESS SERVICE;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A high selectivity and etch rate with innovative approach of inductively coupled plasma source. Preferably, the invention includes a method using plasma chemistry that is divided into main etch step of (e.g., Cl2+HBr+C4F8) gas combination and over etch step of (e.g., HBr+Ar). The main etch step provides a faster etch rate and selectivity while the over etch step will decrease the etch rate and ensure the stringer and residue removal without attacking the under layer.