FLUID CONTAMINATION MONITORS

Brand	Owner	Address	Description
CONTAM ALERT	ROCKWELL AUTOMATION, INC.	1201 S. 2nd St. Milwaukee WI 53204	FLUID CONTAMINATION MONITORS;CONTAMINATION ALERT;ALERT;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

An apparatus and a method is provided for using high-frequency acoustic energy with a supercritical fluid to perform a semiconductor wafer ("wafer") cleaning process. High-frequency acoustic energy is applied to the supercritical fluid to impart energy to particulate contamination present on the wafer surface. Energy imparted to particulate contamination via the high-frequency acoustic energy and supercritical fluid is used to dislodge and remove the particulate contamination from the wafer. Additionally, the wafer cleaning process benefits from the supercritical fluid properties of near zero surface tension, high diffusivity, high density, and chemical mixing capability.