GENERAL CLEANING SOLUTIONS FOR

Brand	Owner	Address	Description
PROTE	PROTEX INTERNATIONAL	6, rue Barbès F-92300 LEVALLOIS-PERRET France	GENERAL CLEANING SOLUTIONS FOR THE BUILDING, TEXTILE, TANNING, PAPER AND METALS INDUSTRY, NAMELY CLEANING AND SCRAPPING AGENTS, AND CORRODENTS;CHEMICALS FOR THE BUILDING, TEXTILE, TANNING, PAPER, AND METALS INDUSTRY, NAMELY DISPERSANTS, DETERGENTS FOR USE IN INDUSTRIAL PROCESSES, FIXERS OF DYES, SURFACE TREATING AGENTS FOR METALS, EMULSIFYING AGENTS, AND AGENTS USED AS INGREDIENTS IN TEXTILE PRINTING;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Cleaning solutions for photoresist are disclosed which are useful for cleaning a semiconductor substrate in the last step of development when photoresist patterns are formed. Also, methods for forming photoresist patterns using the same are disclosed. The disclosed cleaning solution comprises H2O as a solution, a surfactant which is phosphate-alcoholamine salt represented by Formula 1, and an alcohol compound. The disclosed cleaning solution has lower surface tension than that of distilled water which has been used for conventional cleaning solutions, thereby improving resistance to photoresist pattern collapse and stabilizing the photoresist pattern formation.