HIGH RESISTANCE NEUTRAL GROUNDS

Brand	Owner (click to sort)	Address	Description
GROUND-GARD	Powell Electrical Manufacturing Company	Houston TX	High Resistance Neutral Grounds and Detectors for Electrical Power Systems;GROUND-GUARD;
GROUND-GARD	POWELL ELECTRICAL SYSTEMS, INC.	8550 Moseley Houston TX 77075	HIGH RESISTANCE NEUTRAL GROUNDS AND DETECTORS FOR ELECTRICAL POWER SYSTEMS;GROUND GUARD;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A system and a method to remove a layer of high-k dielectric material during the manufacturing of an integrated circuit. In one embodiment of the invention, an etch reactant is employed to form volatile etch products when reacted with high-k layers. Alternately, high-k layers can be anisotropically etched of in accordance with a patterned photoresist or hard mask, where a hyperthermal beam of neutral atoms is used to aid in the reaction of an etch reactant with a high-k layer. Alternately, a hyperthermal beam of neutral atoms or a plasma treatment can used to modify a high-k layer, and subsequently etch the modified high-k layer utilizing an etch reactant that reacts with the modified high-k layer. In still another embodiment of the invention, the hyperthermal beam of neutral atoms is used to etch a high-k layer through physical bombardment of the high-k layer.