HOLOGRAPHICAL METROLOGY INSTRUMENTS

Brand	Owner	Address	Description
HOLOVISION	ERIM International, Inc.	3300 Plymouth Road Ann Arbor MI 48105	Holographical metrology instruments, computers and computer software, all sold together as a unit, for making non-contact three-dimensional measurements of objects and creating graphic representations of those measured objects;HOLO VISION;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method of generating a metrology recipe includes identifying regions of interest within a device layout. A coordinate list, which corresponds to the identified regions of interest, can be provided and used to create a clipped layout, which can be represented by a clipped layout data file. The clipped layout data file and corresponding coordinate list can be provided and converted into a metrology recipe for guiding one or more metrology instruments in testing a processed wafer and/or reticle. The experimental metrology results received in response to the metrology request can be linked to corresponding design data and simulation data and stored in a queriable database system.