ILLUMINATION OPTICAL SYSTEM IMPROVE

Brand Owner Address Description
SHRINC NIKON INC. 1300 Walt Whitman Road Melville NY 117473064 illumination optical system to improve resolution power of stepper lenses for use in the manufacture of computer chips;SHRINK;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A system for microlithography comprises an illumination source; an illumination optical system including, in order from an objective side, (a) a first diffractive optical element that receives illumination from the illumination source, (b) a zoom lens, (c) a second diffractive optical element, (d) a condenser lens, (e) a relay lens, and (f) a reticle, and a projection optical system for imaging the reticle onto a substrate, wherein the system for microlithography provides a zoomable numerical aperture.