IMMERSION COOLING UNIT

Brand	Owner (click to sort)	Address	Description
DISRUPTOR 2000 IC	RK INDUSTRIES	Attn Legal 3800 Xanthia Street Denver CO 80238	Immersion cooling unit, namely, scalable modular immersion cooling unit;
DISRUPTOR 2000 IMMERSION COOLING (IC)	RK INDUSTRIES	Attn Legal 3800 Xanthia Street Denver CO 80238	Immersion cooling unit, namely, scalable modular immersion cooling unit;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method and apparatus for immersion lithography is described. The method includes positioning a semiconductor substrate under an optical immersion head assembly, providing an immersion liquid between the substrate and the optical immersion head assembly, and supplying a tensio-active gaseous substance along the perimeter of the contact area of the immersion liquid and the substrate. The immersion liquid contacts at least an area of the substrate. The tensio-active gaseous substance is chosen such that, when at least partially mixed with the immersion liquid, the mixture has a lower surface tension than the immersion liquid, thereby creating a surface tension gradient pulling the immersion liquid from the perimeter towards an inside portion of the contact area.