MACHINERY USING LASER BEAM TECHNOLOGY

Brand Owner Address Description
LASER INDUSTRIES LASER INDUSTRIES, INC. 360 MERRIMACK ST. LAWRENCE MA 01842 MACHINERY USING LASER BEAM TECHNOLOGY FOR METAL WORKING AND OTHER INDUSTRIAL APPLICATION;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. It is an object to provide a laser apparatus, a laser irradiating method and a manufacturing method of a semiconductor device that can perform uniform a process with a laser beam to an object uniformly. The present invention provides a laser apparatus comprising an optical system for sampling a part of a laser beam emitted from an oscillator, a sensor for generating an electric signal including fluctuation in energy of the laser beam as a data from the part of the laser beam, a means for performing signal processing to the electrical signal to grasp a state of the fluctuation in energy of the laser beam, and controlling a relative speed of an beam spot of the laser beam to an object in order to change in phase with the fluctuation in energy of the laser beam.