MANUFACTURE MICROELECTRONIC MECHANICAL SYSTEMS

Brand	Owner	Address	Description
STRESSEDMETAL	PALO ALTO RESEARCH CENTER INC.	3333 Coyote Hill Road Palo Alto CA 94304	Manufacture of microelectronic mechanical systems to the order and/or specification of others;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method and apparatus for removing conductive material from a microelectronic substrate. In one embodiment, a support member supports a microelectronic substrate relative to a material removal medium, which can include first and second electrodes and a polishing pad. One or more electrolytes are disposed between the electrodes and the microelectronic substrate to electrically link the electrodes to the microelectronic substrate. The electrodes are then coupled to a source of varying current that electrically removes the conductive material from the substrate. The microelectronic substrate and/or the electrodes can be moved relative to each other to position the electrodes relative to a selected portion of the microelectronic substrate, and/or to polish the microelectronic substrate. The material removal medium can remove gas formed during the process from the microelectronic substrate and/or the electrodes. The medium can also have different first and second electrical characteristics to provide different levels of electrical coupling to different regions of the microelectronic substrate.