METAL CLEANING COMPOUNDS IN

Brand	Owner (click to sort)	Address	Description
FERRODEX	ATOTECH DEUTSCHLAND GMBH	Erasmusstrasse 20 Berlin 10553 Germany	METAL CLEANING COMPOUNDS IN THE NATURE OF ALKALINE SOAKS FOR USE IN CLEANING METALS BY ELECTROLYSIS;
KEMTEX	MACDERMID OF BRISTOL, INC.	HARWINTON AVENUE PLYMOUTH CT 06782	METAL CLEANING COMPOUNDS IN THE NATURE OF SOLUBLE SALTS FOR USE IN PREPARING METALS FOR PLATING, BUFFING, AND OTHER OPERATIONS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Disclosed are a method for cleaning a deposition chamber by removing attached metal oxides, and a deposition apparatus for performing in situ cleaning. A first gas and a second gas are provided into the deposition chamber. The first gas is reacted with metal included in the metal oxide to generate reacting residues. The second gas then decomposes the reacting residues, and the decomposed residues are exhausted out of the chamber. Thus, this cleaning process can be rapidly accomplished while the deposition chamber is not opened or separated from a deposition apparatus.