METAL CLEANING PREPARATION

Brand	Owner (click to sort)	Address	Description
AMBIDET	METALLINE CHEMICALS CORPORATION	10620 N. Port Washington Road Mequon WI 53902	METAL CLEANING PREPARATION;
AMBIDET	JSA International, Inc.	10620 North Port Washington Road Mequon WI 53202	Metal cleaning preparation;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Disclosed are a method for cleaning a deposition chamber by removing attached metal oxides, and a deposition apparatus for performing in situ cleaning. A first gas and a second gas are provided into the deposition chamber. The first gas is reacted with metal included in the metal oxide to generate reacting residues. The second gas then decomposes the reacting residues, and the decomposed residues are exhausted out of the chamber. Thus, this cleaning process can be rapidly accomplished while the deposition chamber is not opened or separated from a deposition apparatus.