METAL ORGANIC VAPOR DEPOSITION EQUIPMENT

Brand	Owner (click to sort)	Address	Description
AIXTRON	AIXTRON SE	Dornkaulstraße 2 52134 Herzogenrath Germany	METAL ORGANIC VAPOR DEPOSITION EQUIPMENT, NAMELY, EPITAXIAL REACTORS, GAS HANDLERS [ AND EXHAUST GAS SCRUBBERS ];
AIXTRON	AIXTRON GMBH	JUELICHERSTRASSE 336-338 AACHEN Germany	METAL ORGANIC VAPOR DEPOSITION EQUIPMENT, NAMELY, EPITAXIAL REACTORS, GAS HANDLERS [ AND EXHAUST GAS SCRUBBERS ];
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

In one embodiment, the present invention includes introducing a conventional precursor and an organic precursor having an organic porogen into a vapor deposition apparatus; and forming a dielectric layer having the organic porogen on a substrate within the vapor deposition apparatus from the precursors. In certain embodiments, at least a portion of the organic porogen may be removed after subsequent processing, such as dual damascene processing.