METAL RESIST

Brand	Owner	Address	Description
METALRESIST	AKZO AMERICA INC.	SAND HILL ROAD ENKA NC 28728	METAL RESIST;FLUID CRACKING CATALYSTS FOR USE IN THE REFINING INDUSTRY;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A low-k dielectric film is deposited on the wafer. A metal layer is then deposited over the low-k dielectric film. A resist pattern is formed over the metal layer. The resist pattern is then transferred to the underlying metal layer to form a metal pattern. The resist pattern is stripped off. A through hole is plasma etched into the low-k dielectric film by using the metal pattern as a hard mask. The plasma etching causes residues to deposit within the through hole. A first wet treatment is then performed to soften the residues. A plasma dry treatment is carried out to crack the residues. A second wet treatment is performed to completely remove the residues.