METAL OXIDE DIELECTRIC COATINGS

Brand	Owner	Address	Description
PALISADE	APPLIED MATERIALS, INC.	3050 Bowers Avenue Santa Clara CA 95054	Metal oxide dielectric coatings for use in semiconductor manufacturing;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A transition metal oxide dielectric material is doped with a non-metal in order to enhance the electrical properties of the metal oxide. In a preferred embodiment, a transition metal oxide is deposited over a bottom electrode and implanted with a dopant. In a preferred embodiment, the metal oxide is hafnium oxide or zirconium oxide and the dopant is nitrogen. The dopant can convert the crystal structure of the hafnium oxide or zirconium oxide to a tetragonal structure and increase the dielectric constant of the metal oxide.