MULTI CHAMBER VACUUM DEPOSITION UNITS

Brand	Owner	Address	Description
LUMINOS	KURT J. LESKER COMPANY	1925 ROUTE 51 JEFFERSON HILLS PA 15025	Multi-chamber vacuum deposition units for organic light-emitting diode and polymer light emitting diode devices;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method includes removing at least a piece of a deposition chamber liner from a deposition chamber by passing it through a passageway to the deposition chamber through which semiconductor substrates pass into and out of the chamber for deposition processing. A replacement for the removed deposition chamber liner piece is provided into the chamber by passing the replacement through said passageway. A liner apparatus includes a plurality of pieces which when assembled within a selected semiconductor substrate deposition processor chamber are configured to restrict at least a majority portion of all internal wall surfaces which define said semiconductor substrate deposition processor chamber from exposure to deposition material within the chamber. At least some of the pieces are sized for passing completely through a substrate passageway to the chamber through which semiconductor substrates pass into and out of the chamber for deposition processing.