NITROGEN CONTAINING MATERIALS FOR USE AS

Brand	Owner	Address	Description
STEAMBOAT	LAROCHE INDUSTRIES INC.	PERIMETER 400 CENTER TWO 1100 JOHNSON FERRY ROAD, N.W. ATLANTA GA 30342	NITROGEN-CONTAINING MATERIALS FOR USE AS FERTILIZERS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Methods of depositing a tantalum-nitride (TaN) diffusion barrier region on low-k materials. The methods include forming a protective layer on the low-k material substrate by performing plasma-enhanced atomic layer deposition (PE-ALD) from tantalum-based precursor and a nitrogen plasma in a chamber. The protective layer has a nitrogen content greater than its tantalum content. A substantially stoichiometric tantalum-nitride layer is then formed by performing PE-ALD from the tantalum-based precursor and a plasma including hydrogen and nitrogen. The invention also includes the tantalum-nitride diffusion barrier region so formed. In one embodiment, the metal precursor includes tantalum penta-chloride (TaCl5). The invention generates a sharp interface between low-k materials and liner materials.