OPTICAL MONITORING

Brand Owner (click to sort) Address Description
ELIPSON NOVA LTD 5 DAVID FIKES ST. REHOVOT 7632805 Israel Optical monitoring, measurement and inspection equipment for measuring dimensional and/or material properties of samples, namely, for analyzing and inspecting patterned structures and films in the field of semiconductor manufacturing, and systems comprised of hardware and recorded software for process control of semiconductors manufacturing, and recorded computer operating programs for use therewith;
PRIZM Nova Measuring Instruments Ltd. P.O. Box 266 Weizmann Science Park Rehovot 76100 Israel Optical monitoring, measurement and inspection equipment for measuring physical dimensions of samples, thicknesses of films and for analyzing chemical composition of materials, and systems comprised of hardware and software for process control, and computer operating programs for use therewith;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A chemical mechanical polishing apparatus and method can use an eddy current monitoring system and an optical monitoring system. Signals from the monitoring systems can be combined on an output line and extracted by a computer. A thickness of a polishing pad can be calculated. The eddy current monitoring system and optical monitoring system can measure substantially the same location on the substrate.