OPTICAL THIN FILM COATING SYSTEM

Brand	Owner	Address	Description
MICRODYN	DEPOSITION SCIENCES, INC.	3300 Coffey Lane Santa Rosa CA 95403	optical thin film coating system comprised of a sputtering magnetron, plasma source and source of microwave energy, all located proximate to a substrate carrier and housed within a vacuum chamber;MICRO-DYN;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Any one of an insulating film forming a TFT, a silicon film and a conductive film is formed by applying a solution and annealing it. In a spin coater (102), a coating solution containing a thin film component which is supplied from a solution storage section (105) is spin-coated onto a substrate. The substrate after coating the coating solution is annealed in an annealing section (103) to form a coating film on the substrate. Additional laser annealing improves one of film characteristics, i.e., crystallinity, density and adhesiveness. Application of the coating solution or a resist by an ink jet process increases utilization of the solution and permits forming a patterned coating film. Because a thin film device in accordance with the present invention is inexpensive and has a high throughput, TFT production by a production system having high utilization of the coating solution drastically reduces initial investment and production cost of a liquid crystal display device.