ORGANIC CHEMICAL DYE MATERIALS FOR

Brand	Owner	Address	Description
LAMBDACHROME	COHERENT GMBH	Hans-Boeckler Strasse 12 Goettingen 37079 Germany	ORGANIC CHEMICAL DYE MATERIALS FOR USE IN DYE LASERS;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Processing problems associated with porous low-k dielectric materials are often severe. Exposure of low-k materials to plasma during feature etching, ashing, and priming steps has deleterious consequences. For porous, silicon-based low-k dielectric materials, the plasma depletes a surface organic group, raising the dielectric constant of the material. In the worst case, the damaged dielectric is destroyed during the wet etch removal of the antireflective coating in the via-first copper dual-damascene integration scheme. This issue is addressed by exposing the dielectric to silane coupling agents at various stages of etching and cleaning. Chemical reactions with the silane coupling agent both replenish the dielectric surface organic group and passivate the dielectric surface relative to the surface of the antireflective coating.