PERFORMING AUTOMATED CLEANING ECONOMIZERS

Brand	Owner	Address	Description
BOILER BOT	VEOLIA ES INDUSTRIAL SERVICES, INC.	200 East Randolph Drive, Suite 7900 Chicago IL 60601	Performing automated cleaning of economizers and back passes inside of industrial heat transfer equipment using a high-pressure jet and an infrared camera mounted on a remote controlled wheeled robotic cleaning device in Class 037;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Semiconductor manufacturing processes that reduce production costs as well as increase throughput by substituting the PR strip and ACT wet cleaning procedure after the via contact etching of a semiconductor with dry cleaning to be performed while removing a photoresist in a conventional PR strip apparatus. In addition, the methods can shorten waiting time and maintain consistency in the process by performing the PR strip and cleaning at the same time in the same chamber. The resultant devices have lower via contact resistance and its deviation, as compared to the conventional PR strip and ACT wet cleaning.