PHASE METROLOGY SYSTEM COMPRISED

Brand Owner Address Description
PHAME CARL ZEISS MICROSCOPY GMBH Carl-Zeiss-Promenade 10 Jena 07745 Germany Phase metrology system comprised of a laser, homogenizer, polarizer, an objective, and a camera, used in the semiconductor industry to analyze lithographic photo masks;PHASE METROLOGY; FAME;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A method, apparatus, and a system for providing data representation associated with non-sampled workpieces. Measured metrology data relating to a first workpiece is received. Metrology data corresponding to a second workpiece is approximated based upon the metrology data relating to the first workpiece to provide a projected metrology data relating to the second workpiece.