PHOTORESISTS USED MANUFACTURE

Brand Owner Address Description
KMPR KAYAKU ADVANCED MATERIALS, INC. 200 Flanders Road Westborough MA 01581 Photoresists used in the manufacture of microelectronic devices, micro-electromechanical systems and electronic device packaging;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. New photoresists are provided that are suitable for short wavelength imaging, including sub-300 nm and sub-200 nm such as 193 nm and 157 nm. Photoresists of the invention contain a resin with photoacid-labile groups, one or more photoacid generator compounds, and an adhesion-promoting additive compound. Photoresists of the invention can exhibit significant adhesion to SiON and other inorganic surface layers.