POWER DRIVEN DISPENSERS FOR RETAINING RINGS

Brand	Owner	Address	Description
RING-O-MAT	WALDES KOHINOOR, INC.	47-10 HUSTEL PLACE LONG ISLAND CITY NY	Power-Driven Dispensers for Retaining Rings;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

Retaining rings, planarizing apparatuses including retaining rings, and methods for mechanical and/or chemical-mechanical planarization of micro-device workpieces are disclosed herein. In one embodiment, a carrier head for retaining a micro-device workpiece during mechanical or chemical-mechanical polishing includes a workpiece holder configured to receive the workpiece and a retaining ring carried by the workpiece holder. The retaining ring includes an inner surface, an outer surface, a first surface between the inner surface and the outer surface, and a plurality of grooves in the first surface extending from the inner surface to the outer surface. The grooves include at least a first groove and a second groove positioned adjacent and at least substantially transverse to the first groove.