PURE BEAM

Brand	Owner	Address	Description
PUREBEAM	Fritz A. Brauer	3025 Industry St., Suite A Oceanside CA 92054	PURE BEAM;Lasers for surgical and medical use;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A method and apparatus for dry etching pure Cu and Cu-containing layers (220, 310) for manufacturing integrated circuits. The invention uses a directional beam of O-atoms with high kinetic energy (340) to oxidize the Cu and Cu-containing layers, and etching reagents (370) that react with the oxidized Cu (360) to form volatile Cu-containing etch products (390). The invention allows for low-temperature, anisotropic etching of pure Cu and Cu-containing layers in accordance with a patterned hard mask or photoresist (230, 330).