RESIST STRIP

Brand	Owner (click to sort)	Address	Description
RESISTSTRIP	ATOTECH USA INC.	1750 Overview Drive P.O. Box 12000 Rock Hill SC 297312000	RESIST STRIP;solvent-type processing chemicals for use in the printed circuit industry;
RESISTSTRIP	ATOTECH DEUTSCHLAND GMBH	Erasmusstrasse 20 Berlin 10553 Germany	RESIST STRIP;Color is not claimed as a feature of the mark.;Solvent-type processing chemicals for use in the printed circuit industry;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A porous low-k film, a sacrificial film that can be dissolved in a pure water, an antireflection film and a resist film are successively formed on a dielectric film on a wafer and subsequently exposing the resist film to light in a prescribed pattern and developing the resist film so as to form a prescribed circuit pattern in the resist film. Then, the wafer W is etched so as to form a via hole in the porous low-k film, followed by processing the wafer with a hydrogen peroxide solution so as to denature the resist film. Further, the sacrificial film is dissolved in a pure water so as to strip the resist film and the antireflection film from the water. As a result, a via hole excellent in the accuracy of the shape is formed without doing damage to the dielectric film.