ROBOTIC WAFER TRANSFER SYSTEM USED

Brand	Owner	Address	Description
CALIBER	BROOKS AUTOMATION, INC.	15 Elizabeth Drive Chelmsford MA 01824	robotic wafer transfer system used in the manufacture of integrated circuits and semiconductor devices;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A controller controls a wafer carrier to move from a SMIF-POD to transfer and collect a wafer between a space of a transfer unit through a thermal chamber. The wafer carrier is returned into the SMIF-POD, when the wafer is exposed, to be kept waiting in the SMIF-POD until the wafer completes the exposure. The wafer can be shielded from direct airflow by a protection plate inside the transfer area.