SEMICONDUCTOR CHEMICAL VAPOR DEPOSITION EQUIPMENT

Brand	Owner	Address	Description
VOLTA	Applied Materials	3050 Bowers Ave Santa Clara CA 95054	Semiconductor chemical vapor deposition equipment used in the manufacturing of integrated circuits;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A technique for more efficiently forming conductive elements, such as conductive layers and electrodes, using chemical vapor deposition. A conductive precursor gas, such as a platinum precursor gas, having organic compounds to improve step coverage is introduced into a chemical vapor deposition chamber. A reactant is also introduced into the chamber that reacts with residue organic compounds on the conductive element so as to remove the organic compounds from the nucleating sites to thereby permit more efficient subsequent chemical vapor deposition of conductive elements.