SHOCK ABSORBING APPARATUS USED IN

Brand	Owner	Address	Description
SOFT-DRIL	HUGHES TOOL COMPANY	300 HUGHES STREET HOUSTON TX	SHOCK ABSORBING APPARATUS USED IN THE DRILL STRING OF EARTH BORING MACHINES;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A shock absorbing apparatus in a positioning apparatus including a stage apparatus is disclosed. The positioning apparatus includes a main body apparatus for mounting the stage apparatus thereto, and a chamber for maintaining a region, in which the stage apparatus is disposed, under a condition of vacuum or purged ambience. The shock absorbing apparatus includes a shock absorber provided at a stroke end of the stage apparatus, and a support member provided separately from the stage apparatus, to which the shock absorber is fixed. In the shock absorbing apparatus of the present invention, the shock absorbing apparatus is fixed to the support member provided separately from the stage apparatus including a driving system, and accordingly an increase in size of the stage apparatus can be prevented, and high-speed and highly-precise positioning of an object to be positioned can be performed in a non-atmospheric ambience.